Birth date: 26.04.1980
E-mail:
Keywords: multilayer X-ray optics, EUV lithography, shape correction.

Subject:

Multilayer X-ray optics, EUV lithography, ion-beam etching.

Main publications:

1. S.S. Andreev, M.S. Bibishkin, N.I. Chkhalo, A.Ya. Lopatin, V.I. Luchin, A.E. Pestov, K.A. Prokhorov, N.N. Salashchenko, “Application of free-standing multilayer films as polarizers for X-ray radiation”, Nuclear Instruments and Methods in Physics Research A, 543 (2005), 340–345
2. M.S. Bibishkin, N.I. Chkhalo, A.A. Fraerman, A.E. Pestov, K.A. Prokhorov, N.N. Salashchenko, Yu.A. Vainer, “Ultra-short period X-ray mirrors: Production and investigation”, Nuclear Instruments and Methods in Physics Research A, 543 (2005), 333–339
3. Vainer Yu.A., Pestov A.E., Prokhorov K.A., Salaschenko N.N., Fraerman A.A., Chernov V.V., Chkhalo N.I., “Issledovanie poperechnoi korrelyatsii sherokhovatostei granits v mnogosloinykh strukturakh s ulra-korotkimi periodami”, Zhurnal eksperimentalnoi i teoreticheskoi fiziki, 130:3 (2006), 401–408
4. S.S. Andreev, M.M. Barysheva, N.I. Chkhalo, S.A. Gusev, A.E. Pestov, V.N. Polkovnikov, N.N. Salashchenko, L.A. Shmaenok, Yu.A. Vainer, S.Yu. Zuev, “Multilayered mirrors based on La/B4C(B9C) for X-ray range near anomalous dispersion of boron ($l\approx 6.7nm$)”, Nuclear Instruments and Methods in Physics Research A, 603 (2009), 80–82
5. N.I. Chkhalo, E.B. Kluenkov, A.E. Pestov, V.N. Polkovnikov, D.G. Raskin, N.N. Salashchenko, L.A. Suslov, M.N. Toropov, “Manufacturing of XEUV mirrors with a sub-nanometer surface shape accuracy”, Nuclear Instruments and Methods in Physics Research A, 603 (2009), 62–65

Publications in Math-Net.Ru

Personal pages:

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Organisations:

• Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod