Regularizing algorithms for the determination of thickness of deposited layers in optical coating production

T. F. Isaev^a, I. V. Kochikov^b, D. V. Lukyanenko^a, A. V. Tikhonravov^b, A. G. Yagola<sup>a

a</sup> Department of Mathematics, Faculty of Physics, Lomonosov Moscow State University, Moscow 119991, Russia
^b Research Computing Center, Lomonosov Moscow State University, Moscow 119992, Russia

Аннотация: Production of the modern advanced multi-layer optical coatings requires on-line monitoring of the growing layer thickness. We present regularizing algorithms for the continuous on-line determination of the deposited layer thickness that can be used in the coating production with broadband optical monitoring. These algorithms are based on minimization of the Tikhonov functional as well as on the allocation of the correctness set. Numerical experiments confirm the effectiveness of the proposed algorithms.

Ключевые слова: inverse problems in optics, regularizing algorithm, thin films, broadband optical monitoring.

MSC: 47J06, 78A48, 78A50

Язык публикации: английский

DOI: 10.32523/2306-6172-2018-6-4-38-47

Реферативные базы данных:

• 
•