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Dunaev Alexandr Valer'evich
Publications in Math-Net.Ru
Study of the surface of GaAs after etching in high-frequency and glow discharge plasma by atomic force microscopy
Fizika i Tekhnika Poluprovodnikov
,
50
:2 (2016),
167–170
Effect of Mixture Composition on the Electrophysical Parameters and Emission Spectra of
$\mathrm{HCl}$
–
$\mathrm{O}_2$
and
$\mathrm{HCl}$
–
$\mathrm{Ar}$
Plasma
TVT
,
49
:4 (2011),
509–512
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Steklov Math. Inst. of RAS
, 2026