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Chernysh Vladimir Savel'evich

Publications in Math-Net.Ru

  1. Preferential sputtering of NiTi alloy by atomic and gas cluster ions

    Pisma v Zhurnal Tekhnicheskoi Fiziki, 49:11 (2023),  34–38
  2. Preferential sputtering of alloys by gas cluster ions

    Zhurnal Tekhnicheskoi Fiziki, 92:12 (2022),  1943–1950
  3. Amorphization of silicon nanowires upon irradiation with argon ions

    Pisma v Zhurnal Tekhnicheskoi Fiziki, 48:2 (2022),  11–14
  4. Gas-dynamic sources of cluster ions for basic and applied research

    UFN, 192:7 (2022),  722–753
  5. Influence of the charge state of xenon ions on the depth distribution profile upon implantation into silicon

    Fizika i Tekhnika Poluprovodnikov, 53:8 (2019),  1030–1036
  6. In situ modification and analysis of the composition and crystal structure of a silicon target by ion-beam methods

    Zhurnal Tekhnicheskoi Fiziki, 88:12 (2018),  1900–1907
  7. Study of the distribution profile of iron ions implanted into silicon

    Fizika i Tekhnika Poluprovodnikov, 51:6 (2017),  778–782
  8. Polishing superhard material surfaces with gas-cluster ion beams

    Pisma v Zhurnal Tekhnicheskoi Fiziki, 43:2 (2017),  18–23
  9. Gas cluster ion formation under pulsed supply of various working gases

    Pisma v Zhurnal Tekhnicheskoi Fiziki, 41:22 (2015),  8–14
  10. Defect formation and recrystallization mechanisms in silicon-on-sapphire films under ion irradiation

    Fizika i Tekhnika Poluprovodnikov, 48:4 (2014),  535–538
  11. Fabrication of ultrafine silicon layers on sapphire

    Pisma v Zhurnal Tekhnicheskoi Fiziki, 38:19 (2012),  83–89
  12. Implantation of high-energy ions produced by femtosecond laser pulses

    Kvantovaya Elektronika, 35:1 (2005),  33–37


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