Ivanov Aleksandr Sergeevich

Publications in Math-Net.Ru

1. High-power EUV (13.5 nm) light source
   
   Kvantovaya Elektronika, 40:8 (2010),  720–726
2. Laser-induced extreme UV radiation sources for manufacturing next-generation integrated circuits
   
   Kvantovaya Elektronika, 39:10 (2009),  967–972
3. Development of high-power KrF lasers with a pulse repetition rate up to 5 kHz
   
   Kvantovaya Elektronika, 30:9 (2000),  783–786