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Lopatin Aleksei Yakovlevich

Publications in Math-Net.Ru

  1. Формирование перспективных для электронно-лучевой и экстремально-ультрафиолетовой нанолитографии тонкопленочных резистивных материалов на основе оловоорганических оксокластеров

    Zhurnal Tekhnicheskoi Fiziki, 96:2 (2026),  383–394
  2. Stand for testing extreme ultraviolet sensitive photoresists

    Zhurnal Tekhnicheskoi Fiziki, 94:8 (2024),  1323–1330
  3. Capsule gas-filled target for a laser-plasma EUV source

    Zhurnal Tekhnicheskoi Fiziki, 94:7 (2024),  1174–1181
  4. Using of ion-beam etching of free-standing films for the development of wavefront correctors in the EUV wavelength range

    Zhurnal Tekhnicheskoi Fiziki, 94:7 (2024),  1029–1035
  5. Acceleration of electrons upon interaction of laser pulses with solid targets in the laser peeler regime

    Kvantovaya Elektronika, 54:1 (2024),  35–42
  6. Emission characteristics of a laser-plasma source of extreme ultraviolet radiation with thin-film targets

    Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023),  892–896
  7. Imaging system of a plasma torch of a Betatron X-ray source

    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1202–1206
  8. Thin film Al targets for a laser-plasma source of extreme ultraviolet radiation

    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1199–1201
  9. Search for high-strength multilayer free-standing film filters with high transmittance in the wavelength range of the “water window” (2.3–4.4 nm)

    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1130–1136
  10. Comparative study of the thermal stability of Be-based extreme ultraviolet pellicles

    Zhurnal Tekhnicheskoi Fiziki, 92:1 (2022),  92–99
  11. Measurements of the absolute values of the radiation intensity in the wavelength range of 6.6–32 nm of stainless steel targets with pulsed laser excitation

    Zhurnal Tekhnicheskoi Fiziki, 91:10 (2021),  1448–1453
  12. Measurements of the absolute intensities of spectral lines of Kr, Ar, and O ions in the wavelength range of 10--18 nm under pulsed laser excitation

    Kvantovaya Elektronika, 51:8 (2021),  700–707
  13. Prospects for the use of X-ray tubes with a field-emission cathode and a through-type anode in the range of soft X-ray radiation

    Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020),  1806–1816
  14. Lasing efficiency of krypton ions in the (8–14)-nm band upon pulsed laser excitation

    Kvantovaya Elektronika, 50:4 (2020),  408–413
  15. Optical, mechanical, and thermal properties of free-standing MoSi$_{2}$N$_{x}$ и ZrSi$_{2}$N$_{y}$ nanocomposite films

    Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019),  1680–1685
  16. Laboratory reflectometer for the investigation of optical elements in a wavelength range of 5 – 50 nm: description and testing results

    Kvantovaya Elektronika, 47:4 (2017),  385–392
  17. Freestanding film structures for laser plasma experiments

    Kvantovaya Elektronika, 43:4 (2013),  388–391
  18. Silicon photodiode with selective Zr/Si coating for extreme ultraviolet spectral range

    Kvantovaya Elektronika, 42:10 (2012),  943–948
  19. New focusing multilayer structures for X-ray and VUV plasma spectroscopy

    Zhurnal Tekhnicheskoi Fiziki, 80:7 (2010),  105–110

  20. Dispersion elements for X-ray mirror spectrometer on a range of 7–30 nm

    Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023),  1002–1008


© Steklov Math. Inst. of RAS, 2026