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Publications in Math-Net.Ru
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Формирование перспективных для электронно-лучевой и экстремально-ультрафиолетовой нанолитографии тонкопленочных резистивных материалов на основе оловоорганических оксокластеров
Zhurnal Tekhnicheskoi Fiziki, 96:2 (2026), 383–394
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Stand for testing extreme ultraviolet sensitive photoresists
Zhurnal Tekhnicheskoi Fiziki, 94:8 (2024), 1323–1330
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Capsule gas-filled target for a laser-plasma EUV source
Zhurnal Tekhnicheskoi Fiziki, 94:7 (2024), 1174–1181
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Using of ion-beam etching of free-standing films for the development of wavefront correctors in the EUV wavelength range
Zhurnal Tekhnicheskoi Fiziki, 94:7 (2024), 1029–1035
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Acceleration of electrons upon interaction of laser pulses with solid targets in the laser peeler regime
Kvantovaya Elektronika, 54:1 (2024), 35–42
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Emission characteristics of a laser-plasma source of extreme ultraviolet radiation with thin-film targets
Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023), 892–896
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Imaging system of a plasma torch of a Betatron X-ray source
Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022), 1202–1206
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Thin film Al targets for a laser-plasma source of extreme ultraviolet radiation
Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022), 1199–1201
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Search for high-strength multilayer free-standing film filters with high transmittance in the wavelength range of the “water window” (2.3–4.4 nm)
Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022), 1130–1136
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Comparative study of the thermal stability of Be-based extreme ultraviolet pellicles
Zhurnal Tekhnicheskoi Fiziki, 92:1 (2022), 92–99
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Measurements of the absolute values of the radiation intensity in the wavelength range of 6.6–32 nm of stainless steel targets with pulsed laser excitation
Zhurnal Tekhnicheskoi Fiziki, 91:10 (2021), 1448–1453
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Measurements of the absolute intensities of spectral lines of Kr, Ar, and O ions in the wavelength range of 10--18 nm under pulsed laser excitation
Kvantovaya Elektronika, 51:8 (2021), 700–707
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Prospects for the use of X-ray tubes with a field-emission cathode and a through-type anode in the range of soft X-ray radiation
Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020), 1806–1816
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Lasing efficiency of krypton ions in the (8–14)-nm band upon pulsed laser excitation
Kvantovaya Elektronika, 50:4 (2020), 408–413
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Optical, mechanical, and thermal properties of free-standing MoSi$_{2}$N$_{x}$ и ZrSi$_{2}$N$_{y}$ nanocomposite films
Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019), 1680–1685
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Laboratory reflectometer for the investigation of optical elements in a wavelength range of 5 – 50 nm: description and testing results
Kvantovaya Elektronika, 47:4 (2017), 385–392
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Freestanding film structures for laser plasma experiments
Kvantovaya Elektronika, 43:4 (2013), 388–391
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Silicon photodiode with selective Zr/Si coating for extreme ultraviolet spectral range
Kvantovaya Elektronika, 42:10 (2012), 943–948
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New focusing multilayer structures for X-ray and VUV plasma spectroscopy
Zhurnal Tekhnicheskoi Fiziki, 80:7 (2010), 105–110
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Dispersion elements for X-ray mirror spectrometer on a range of 7–30 nm
Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023), 1002–1008
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