Publications in Math-Net.Ru
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Formation of titanium nitride films by reactive magnetron sputtering under low pressure
PFMT, 2016, no. 2(27), 12–17
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Effect of the processes in the laser ablation plume on the resistivity and morphology of nanocrystalline ZnO films
Fizika Tverdogo Tela, 57:10 (2015), 2037–2042
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Electrical and optical properties of zinc-oxide films deposited by the ion-beam sputtering of an oxide target
Fizika i Tekhnika Poluprovodnikov, 48:9 (2014), 1274–1279
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Simulation of physical processes in the surface layer, the formation of micro and nanostructures by electrodynamic influences
PFMT, 2011, no. 2(7), 31–37
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Prediction of targets erosion in magnetron sputtering systems
PFMT, 2010, no. 2(3), 62–67
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