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Vasilev Vladislav Yur'evich
Publications in Math-Net.Ru
Chemical vapour-phase deposition of ruthenium-containing thin films
Usp. Khim.
,
83
:8 (2014),
758–782
Chemical vapour deposition of thin-film dielectrics
Usp. Khim.
,
74
:5 (2005),
452–483
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Steklov Math. Inst. of RAS
, 2026