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Vasilev Vladislav Yur'evich

Publications in Math-Net.Ru

  1. Chemical vapour-phase deposition of ruthenium-containing thin films

    Usp. Khim., 83:8 (2014),  758–782
  2. Chemical vapour deposition of thin-film dielectrics

    Usp. Khim., 74:5 (2005),  452–483


© Steklov Math. Inst. of RAS, 2026