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Pryakhin Dmitry Aleksandrovich
Publications in Math-Net.Ru
Production of nanocrystalline silicon layers using the plasma enhanced chemical vapor deposition from the gas phase of silicon tetrafluoride
Pis'ma v Zh. Èksper. Teoret. Fiz.
,
89
:2 (2009),
80–83
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Steklov Math. Inst. of RAS
, 2026