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Publications in Math-Net.Ru
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Формирование перспективных для электронно-лучевой и экстремально-ультрафиолетовой нанолитографии тонкопленочных резистивных материалов на основе оловоорганических оксокластеров
Zhurnal Tekhnicheskoi Fiziki, 96:2 (2026), 383–394
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Radial distribution of emitting centers in Ar laser plasma
Zhurnal Tekhnicheskoi Fiziki, 95:9 (2025), 1647–1655
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Experimental stand for studying the characteristics of powerful laser-plasma sources of EUV radiation
Zhurnal Tekhnicheskoi Fiziki, 95:9 (2025), 1639–1646
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Calculation and experimental determination of the length of a laser spark in gas-jet targets
Zhurnal Tekhnicheskoi Fiziki, 95:7 (2025), 1289–1296
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Absorption of laser radiation in lps with gas-jet targets
Zhurnal Tekhnicheskoi Fiziki, 95:7 (2025), 1283–1288
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Stand for testing extreme ultraviolet sensitive photoresists
Zhurnal Tekhnicheskoi Fiziki, 94:8 (2024), 1323–1330
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Capsule gas-filled target for a laser-plasma EUV source
Zhurnal Tekhnicheskoi Fiziki, 94:7 (2024), 1174–1181
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Mathematical Modeling of the Gas-Jet Target for Extreme Ultraviolet Laser
Rus. J. Nonlin. Dyn., 20:3 (2024), 413–424
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Emission characteristics of a laser-plasma source of extreme ultraviolet radiation with thin-film targets
Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023), 892–896
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Study of the emission spectra of Cl-, Br-, I-containing targets in the spectral range of 3–6.5 nm when excited by pulsed laser radiation
Kvantovaya Elektronika, 53:5 (2023), 425–429
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Imaging system of a plasma torch of a Betatron X-ray source
Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022), 1202–1206
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Thin film Al targets for a laser-plasma source of extreme ultraviolet radiation
Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022), 1199–1201
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Investigation of the emission properties of gas-jet targets in the “water transparency window” of 2.3–4.4 nm under pulsed laser excitation
Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022), 1185–1191
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Nonlinear Effects of Krypton Flow in a Micronozzle
with a Cylindrical Tube
Rus. J. Nonlin. Dyn., 18:3 (2022), 411–422
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Emission spectra of liquid-jet targets of hexane C$_6$Н$_{14}$, dichloromethane CH$_2$Cl$_2$, methylene bromide CH$_3$Br in the range 4–20 nm under pulsed laser excitation
Optics and Spectroscopy, 130:7 (2022), 991–995
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Emission spectra of molecular gases CHF$_3$, CCl$_2$F$_2$, SF$_6$ in the range 3–20 nm under pulsed laser excitation using various gas jets as targets
Optics and Spectroscopy, 130:2 (2022), 217–223
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Measurements of the absolute values of the radiation intensity in the wavelength range of 6.6–32 nm of stainless steel targets with pulsed laser excitation
Zhurnal Tekhnicheskoi Fiziki, 91:10 (2021), 1448–1453
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Emission spectra of molecular gases N$_2$ and CO$_2$ in the range 3–20 nm under pulsed laser excitation using various gas jets as targets
Optics and Spectroscopy, 129:6 (2021), 755–759
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Emission spectra of heavy inert gases Kr, Xe in the range 3–20 nm under pulsed laser excitation using various gas jets as targets
Optics and Spectroscopy, 129:3 (2021), 266–271
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Emission spectra of light inert gases Ne and Ar in the range 3–20 nm under pulsed laser excitation using various gas jet-targets
Optics and Spectroscopy, 129:2 (2021), 146–152
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Measurements of the absolute intensities of spectral lines of Kr, Ar, and O ions in the wavelength range of 10--18 nm under pulsed laser excitation
Kvantovaya Elektronika, 51:8 (2021), 700–707
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Lasing efficiency of krypton ions in the (8–14)-nm band upon pulsed laser excitation
Kvantovaya Elektronika, 50:4 (2020), 408–413
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Influence of thermal annealing on the properties of multilayer Mo/Be mirrors
Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019), 1783–1788
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Emission properties of laser plasma excited on molecular-cluster carbon dioxide jets
Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019), 1656–1662
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Observation of laser-induced spark in the density jump in a gas-jet target
Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:19 (2019), 14–16
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Laboratory reflectometer for the investigation of optical elements in a wavelength range of 5 – 50 nm: description and testing results
Kvantovaya Elektronika, 47:4 (2017), 385–392
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X-ray optical system for imaging laser plumes with a spatial resolution of up to 70 nm
Kvantovaya Elektronika, 46:4 (2016), 347–352
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Absolute differential bremsstrahlung cross section for the scattering of 0.6-keV electrons by xenon atoms
Pis'ma v Zh. Èksper. Teoret. Fiz., 86:5 (2007), 344–348
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Dispersion elements for X-ray mirror spectrometer on a range of 7–30 nm
Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023), 1002–1008
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