Chkhalo Nikolai Ivanovich

Publications in Math-Net.Ru

1. Automated system for measuring the surface shape of large-size flat and cylindrical mirrors on a Fizeau interferometer
   
   Zhurnal Tekhnicheskoi Fiziki, 95:10 (2025),  1984–1994
2. Electron beam diagnostics using hard X-rays at the SRF SKIF
   
   Zhurnal Tekhnicheskoi Fiziki, 95:10 (2025),  1973–1983
3. Double-mirror monochromator for the 4+ generation “SKIF” synchrotron light source
   
   Zhurnal Tekhnicheskoi Fiziki, 95:10 (2025),  1963–1972
4. Kirkpatrick–Baez focusing system for synchrotron applications
   
   Zhurnal Tekhnicheskoi Fiziki, 95:10 (2025),  1954–1962
5. Reconstruction of optical constants of thin films from laboratory reflectometers
   
   Zhurnal Tekhnicheskoi Fiziki, 95:10 (2025),  1946–1953
6. Applicability of white light interferometers for measuring the roughness of X-ray optical elements
   
   Zhurnal Tekhnicheskoi Fiziki, 95:10 (2025),  1887–1897
7. A compact spectrograph based on a VLS grating for the range of 3–20 nm
   
   Zhurnal Tekhnicheskoi Fiziki, 95:10 (2025),  1879–1886
8. Ion beam machine for correction and aspherization of the surface shape of optical elements UIP-300
   
   Zhurnal Tekhnicheskoi Fiziki, 95:9 (2025),  1825–1835
9. Structural and reflective characteristics of Cr/C multilayer mirrors synthesized by reactive sputtering method
   
   Zhurnal Tekhnicheskoi Fiziki, 95:9 (2025),  1817–1824
10. Multilayer NiMo/C structures fabricated by reactive magnetron sputtering
    
    Zhurnal Tekhnicheskoi Fiziki, 95:9 (2025),  1808–1816
11. Radial distribution of emitting centers in Ar laser plasma
    
    Zhurnal Tekhnicheskoi Fiziki, 95:9 (2025),  1647–1655
12. Experimental stand for studying the characteristics of powerful laser-plasma sources of EUV radiation
    
    Zhurnal Tekhnicheskoi Fiziki, 95:9 (2025),  1639–1646
13. Calculation and experimental determination of the length of a laser spark in gas-jet targets
    
    Zhurnal Tekhnicheskoi Fiziki, 95:7 (2025),  1289–1296
14. Absorption of laser radiation in lps with gas-jet targets
    
    Zhurnal Tekhnicheskoi Fiziki, 95:7 (2025),  1283–1288
15. Study of structural and reflective characteristics of multilayer X-ray mirrors based on a pair of Ru/B materials
    
    Pisma v Zhurnal Tekhnicheskoi Fiziki, 51:1 (2025),  57–60
16. Stand for testing extreme ultraviolet sensitive photoresists
    
    Zhurnal Tekhnicheskoi Fiziki, 94:8 (2024),  1323–1330
17. Correlative extreme ultraviolet, ultraviolet and optical microscopy based on a specular microscope with axial tomography
    
    Zhurnal Tekhnicheskoi Fiziki, 94:8 (2024),  1302–1313
18. The Maskless litographer of direct drawing. Design, structure and application
    
    Zhurnal Tekhnicheskoi Fiziki, 94:8 (2024),  1295–1301
19. High-gradient aspherization of substrates with thin-film Al/Si coatings
    
    Zhurnal Tekhnicheskoi Fiziki, 94:8 (2024),  1288–1294
20. Ni-based multilayer structures for Goebel-type mirrors
    
    Zhurnal Tekhnicheskoi Fiziki, 94:8 (2024),  1280–1287
21. Study of the structural and reflective characteristics of short-period Mo/Be multilayer X-ray mirrors
    
    Zhurnal Tekhnicheskoi Fiziki, 94:8 (2024),  1269–1279
22. Boron based X-ray multilayer mirrors for the spectral range 6.7–9 nm
    
    Zhurnal Tekhnicheskoi Fiziki, 94:8 (2024),  1260–1268
23. Multilayer mirrors based on Cr/Ti for X-Ray microscopy in the “water window”
    
    Zhurnal Tekhnicheskoi Fiziki, 94:8 (2024),  1250–1259
24. Capsule gas-filled target for a laser-plasma EUV source
    
    Zhurnal Tekhnicheskoi Fiziki, 94:7 (2024),  1174–1181
25. High-frequency low-blaze-angle Mo/Be diffraction gratings – efficiency study
    
    Zhurnal Tekhnicheskoi Fiziki, 94:7 (2024),  1128–1135
26. High-frequency multilayer diffraction Si-gratings with a low blaze angle – fabrication
    
    Zhurnal Tekhnicheskoi Fiziki, 94:7 (2024),  1119–1127
27. Using of ion-beam etching of free-standing films for the development of wavefront correctors in the EUV wavelength range
    
    Zhurnal Tekhnicheskoi Fiziki, 94:7 (2024),  1029–1035
28. Investigations of Microscopic X-ray tomography
    
    Zhurnal Tekhnicheskoi Fiziki, 94:7 (2024),  992–1001
29. Investigation of the angular dependences of the velocities of ion-beam sputtering of metals for the synthesis of mask blanks
    
    Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023),  1051–1053
30. Study of the effect of neon ion energy on the surface roughness of the main cuts of monocrystalline silicon during ion etching
    
    Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023),  1046–1050
31. The coating a liquid glass of the optical element substrates and its molecular composition
    
    Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023),  1037–1045
32. Substrates for soft X-ray microscopy based on Si$_3$N$_4$ membranes
    
    Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023),  1032–1036
33. Project of X-ray optical scheme of a lithograph with a transmissive dynamic mask and a synchrotron radiation source
    
    Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023),  980–987
34. Off-axis aspherical collector for EUV-lithography and SXR microscopy
    
    Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023),  963–967
35. Short-period multilayer mirrors for high-resolution multilayer mirror/crystal monochromator
    
    Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023),  943–947
36. Investigation of the properties of multilayer mirrors based on a pair of materials Mo/B$_4$C
    
    Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023),  931–935
37. Emission characteristics of a laser-plasma source of extreme ultraviolet radiation with thin-film targets
    
    Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023),  892–896
38. The theory of axial tomography based on the inverse Radon transform for high-aperture soft X-ray microscopy
    
    Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023),  867–879
39. Study of the emission spectra of Cl-, Br-, I-containing targets in the spectral range of 3–6.5 nm when excited by pulsed laser radiation
    
    Kvantovaya Elektronika, 53:5 (2023),  425–429
40. Method for obtaining atomically smooth substrates from single-crystal silicon by mechanical lapping
    
    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1267–1272
41. Project of a two-mirror monochromator for the photon energy range 8–36 keV for the “SKIF” synchrotron
    
    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1261–1266
42. Prospects for the use of reactive ion-beam etching of fused quartz with a mixture of tetrafluoromethane and argon for aspherizing the surface of optical elements
    
    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1248–1252
43. Diamond-carbide-silicon composite “skeleton” as a promising material for X-ray optical substrates
    
    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1238–1242
44. Model of physical sputtering of amorphous materials
    
    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1230–1237
45. Study of the influence of the energy of argon ions on the surface roughness of the main sections of single-crystal silicon
    
    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1219–1223
46. Prospective wavelengths for projection lithography uing synchrotron radiation
    
    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1207–1212
47. Imaging system of a plasma torch of a Betatron X-ray source
    
    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1202–1206
48. Thin film Al targets for a laser-plasma source of extreme ultraviolet radiation
    
    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1199–1201
49. Investigation of the emission properties of gas-jet targets in the “water transparency window” of 2.3–4.4 nm under pulsed laser excitation
    
    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1185–1191
50. Ru/Sr multilayer mirrors for the spectral range 9–12 nm
    
    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1179–1184
51. Search for high-strength multilayer free-standing film filters with high transmittance in the wavelength range of the “water window” (2.3–4.4 nm)
    
    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1130–1136
52. Research and creation of broadband X-ray mirrors with a spectral transmission band coinciding with emission lines and the possibility of filtering
    
    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1107–1112
53. Comparative study of the thermal stability of Be-based extreme ultraviolet pellicles
    
    Zhurnal Tekhnicheskoi Fiziki, 92:1 (2022),  92–99
54. Emission spectra of liquid-jet targets of hexane C$_6$Н$_{14}$, dichloromethane CH$_2$Cl$_2$, methylene bromide CH$_3$Br in the range 4–20 nm under pulsed laser excitation
    
    Optics and Spectroscopy, 130:7 (2022),  991–995
55. Emission spectra of molecular gases CHF$_3$, CCl$_2$F$_2$, SF$_6$ in the range 3–20 nm under pulsed laser excitation using various gas jets as targets
    
    Optics and Spectroscopy, 130:2 (2022),  217–223
56. Fabrication and testing of Au- and multilayer Mo/Si-coated diffraction gratings with high-order brilliance in high orders in the soft X-ray and EUV ranges
    
    Kvantovaya Elektronika, 52:10 (2022),  955–962
57. Application of cerium oxide nanopowders for silicon polishing
    
    Zhurnal Tekhnicheskoi Fiziki, 91:10 (2021),  1588–1596
58. Wavefront lens corrector for studying flat surfaces
    
    Zhurnal Tekhnicheskoi Fiziki, 91:10 (2021),  1583–1587
59. Manufacturing and research of mirrors with a wide bandwidth for synchrotron applications
    
    Zhurnal Tekhnicheskoi Fiziki, 91:10 (2021),  1524–1531
60. Measurements of the absolute values of the radiation intensity in the wavelength range of 6.6–32 nm of stainless steel targets with pulsed laser excitation
    
    Zhurnal Tekhnicheskoi Fiziki, 91:10 (2021),  1448–1453
61. Solar VUV telescope for nanosatellites
    
    Zhurnal Tekhnicheskoi Fiziki, 91:10 (2021),  1441–1447
62. Emission spectra of molecular gases N$_2$ and CO$_2$ in the range 3–20 nm under pulsed laser excitation using various gas jets as targets
    
    Optics and Spectroscopy, 129:6 (2021),  755–759
63. Emission spectra of heavy inert gases Kr, Xe in the range 3–20 nm under pulsed laser excitation using various gas jets as targets
    
    Optics and Spectroscopy, 129:3 (2021),  266–271
64. Emission spectra of light inert gases Ne and Ar in the range 3–20 nm under pulsed laser excitation using various gas jet-targets
    
    Optics and Spectroscopy, 129:2 (2021),  146–152
65. Measurements of the absolute intensities of spectral lines of Kr, Ar, and O ions in the wavelength range of 10--18 nm under pulsed laser excitation
    
    Kvantovaya Elektronika, 51:8 (2021),  700–707
66. Obtaining of smooth high-precision surfaces by the mechanical lapping method
    
    Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020),  1958–1964
67. Ion-beam methods for high-precision processing of optical surfaces
    
    Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020),  1922–1930
68. Material surface treatment for design of composite optical elements
    
    Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020),  1913–1916
69. Multilayer Cr/Sc mirrors with improved reflection for the “water transparency window” range
    
    Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020),  1893–1897
70. The microstructure of transition boundaries in multilayer Mo/Be systems
    
    Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020),  1884–1892
71. Broadband mirrors for spectroheliographs at the KORTES sun study facility
    
    Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020),  1876–1883
72. The smoothing effect of si layers in multilayer Be/Al mirrors for the 17- to 31-nm range
    
    Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020),  1870–1875
73. Modification and polishing of the holographic diffraction grating grooves by a neutralized Ar ion beam
    
    Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020),  1864–1869
74. Application of novel multilayer normal-incidence mirrors for euv solar spectroscopy
    
    Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020),  1817–1820
75. Prospects for the use of X-ray tubes with a field-emission cathode and a through-type anode in the range of soft X-ray radiation
    
    Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020),  1806–1816
76. Optimization of an anode membrane with a transmission-type target in a system of soft X-ray sources for X-ray nanolithography
    
    Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020),  1789–1796
77. Lasing efficiency of krypton ions in the (8–14)-nm band upon pulsed laser excitation
    
    Kvantovaya Elektronika, 50:4 (2020),  408–413
78. Features of multilayer mirror application for focusing and collimating X-rays from inverse Compton scattering sources
    
    Kvantovaya Elektronika, 50:4 (2020),  401–407
79. Diffraction limited X-ray optics: technology, metrology, applications
    
    UFN, 190:1 (2020),  74–91
80. Development of technological principles for creating a system of microfocus X-ray tubes based on silicon field emission nanocathodes
    
    Zhurnal Tekhnicheskoi Fiziki, 89:12 (2019),  1836–1842
81. Measurement error of interferometers with diffraction reference wave
    
    Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019),  1789–1794
82. Influence of thermal annealing on the properties of multilayer Mo/Be mirrors
    
    Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019),  1783–1788
83. Influence of beryllium barrier layers on the properties of Mo/Si multilayer mirrors
    
    Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019),  1779–1782
84. Multilayer Ag/Y mirrors for the spectral range of 9–11 nm
    
    Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019),  1774–1778
85. Fabrication and study of a concave crystal mirror for the KORTES project
    
    Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019),  1770–1773
86. Optimization of composition, synthesis, and study of broadband multilayer mirrors for the EUV spectral range
    
    Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019),  1763–1769
87. Beryllium as a material for thermally stable X-ray mirrors
    
    Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019),  1686–1691
88. Optical, mechanical, and thermal properties of free-standing MoSi$_{2}$N$_{x}$ и ZrSi$_{2}$N$_{y}$ nanocomposite films
    
    Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019),  1680–1685
89. Emission properties of laser plasma excited on molecular-cluster carbon dioxide jets
    
    Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019),  1656–1662
90. Simulation of local error correction of the surface shape by a low-dimensional ion beam
    
    Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019),  1650–1655
91. Observation of laser-induced spark in the density jump in a gas-jet target
    
    Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:19 (2019),  14–16
92. Stable multilayer reflective coatings for $\lambda$(HeI) = 58.4 nm for the kortes solar telescope
    
    Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:3 (2019),  26–29
93. Comparison of approaches in the manufacture of broadband mirrors for the EUV range: aperiodic and stack structures
    
    Kvantovaya Elektronika, 49:4 (2019),  380–385
94. Absolutely calibrated spectrally resolved measurements of Xe laser plasma radiation intensity in the EUV range
    
    Zhurnal Tekhnicheskoi Fiziki, 88:10 (2018),  1554–1558
95. Laboratory reflectometer for the investigation of optical elements in a wavelength range of 5 – 50 nm: description and testing results
    
    Kvantovaya Elektronika, 47:4 (2017),  385–392
96. Effect of structural defects of aperiodic multilayer mirrors on the properties of reflected (sub)femtosecond pulses
    
    Kvantovaya Elektronika, 47:4 (2017),  378–384
97. The diffraction efficiency of echelle gratings increased by ion-beam polishing of groove surfaces
    
    Pisma v Zhurnal Tekhnicheskoi Fiziki, 42:16 (2016),  34–40
98. Effect of roughness, deterministic and random errors in film thickness on the reflecting properties of aperiodic mirrors for the EUV range
    
    Kvantovaya Elektronika, 46:5 (2016),  406–413
99. X-ray optical system for imaging laser plumes with a spatial resolution of up to 70 nm
    
    Kvantovaya Elektronika, 46:4 (2016),  347–352
100. Investigation of supersmooth optical surfaces and multilayer elements using soft X-ray radiation
     
     Zhurnal Tekhnicheskoi Fiziki, 83:9 (2013),  134–142
101. Silicon photodiode with selective Zr/Si coating for extreme ultraviolet spectral range
     
     Kvantovaya Elektronika, 42:10 (2012),  943–948
102. Precision imaging multilayer optics for soft X-rays and extreme ultraviolet bands
     
     UFN, 182:7 (2012),  727–747
103. Multilayer X-ray mirrors based on La/B$_4$C and La/B$_9$C
     
     Zhurnal Tekhnicheskoi Fiziki, 80:8 (2010),  93–100
104. New focusing multilayer structures for X-ray and VUV plasma spectroscopy
     
     Zhurnal Tekhnicheskoi Fiziki, 80:7 (2010),  105–110
105. Detecting quasi-periodic $\{11n\}$, $n$ = 7–11 faces in samples with Ge/Si quantum dots by grazing X-ray reflectometry
     
     Pisma v Zhurnal Tekhnicheskoi Fiziki, 36:3 (2010),  31–38
106. Extreme-ultraviolet source based on the electron-cyclotron-resonance discharge
     
     Pis'ma v Zh. Èksper. Teoret. Fiz., 88:2 (2008),  103–106
107. X-ray and vacuum-ultraviolet plasma spectroscopy with the use of new focusing multilayer structures
     
     Pis'ma v Zh. Èksper. Teoret. Fiz., 87:1 (2008),  33–35
108. New focusing multilayer structures for X-ray plasma spectroscopy
     
     Kvantovaya Elektronika, 38:2 (2008),  169–171
109. Thermal loads of X-ray tubes with a fixed anode under long-duration exposure
     
     TVT, 44:5 (2006),  770–776


110. Dispersion elements for X-ray mirror spectrometer on a range of 7–30 nm
     
     Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023),  1002–1008
111. Beryllium-based multilayer X-ray optics
     
     UFN, 190:1 (2020),  92–106
112. Захарий Фишелевич Красильник (к 70-летию со дня рождения)
     
     Fizika i Tekhnika Poluprovodnikov, 52:2 (2018),  285–286
113. Zakharii Fishelevich Krasilnik (on his 70th birthday)
     
     UFN, 188:1 (2018),  119–120