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Panteleev Evgeniy Gennad'evich
Publications in Math-Net.Ru
Theoretical study of polymer resist direct etching by heavy ions of average energy
Mat. Model.
,
3
:1 (1991),
11–17
Theoretical study of polymer resists direct etching, accompanied by polymer matrix movement
Mat. Model.
,
2
:3 (1990),
3–14
Modelling of the surface mass ejection for irradiated polymeric resistors
Mat. Model.
,
1
:10 (1989),
70–79
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Steklov Math. Inst. of RAS
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