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Ezhevskaya Tat'yana Borisovna
Publications in Math-Net.Ru
X-ray and infrared spectroscopy of layers produced by cosputtering of spatially separated SiO
$_2$
and Si sources
Fizika i Tekhnika Poluprovodnikov
,
44
:4 (2010),
550–555
©
Steklov Math. Inst. of RAS
, 2026