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Smyslova Tat'yana Nikolaevich
Publications in Math-Net.Ru
Features and mechanisms of growth of cubic silicon carbide films on silicon
Fizika Tverdogo Tela
,
54
:4 (2012),
666–672
Kinetics of disilane molecule decomposition on the growth surface of silicon in vacuum gas-phase epitaxy reactors
Zhurnal Tekhnicheskoi Fiziki
,
82
:11 (2012),
83–92
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