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Bogoyavlenskaya (Bibik) Elena Aleksandrovna
Publications in Math-Net.Ru
Formation of W/HfO
$_2$
/Si gate structures using in situ magnetron sputtering and rapid thermal annealing
Zhurnal Tekhnicheskoi Fiziki
,
84
:5 (2014),
82–87
Annealing effect on the formation of high-
$k$
dielectric in the W/ultrathin HfO
$_2$
/Si-substrate system
Pisma v Zhurnal Tekhnicheskoi Fiziki
,
38
:21 (2012),
48–55
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, 2026