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Medetov Nurlan Amirovich

Publications in Math-Net.Ru

  1. On the nature of cracks using single-crystalline silicon subjected to anodic etching as an example

    Fizika i Tekhnika Poluprovodnikov, 48:8 (2014),  1117–1122
  2. Problems in measurements of parameters of elements and structures in modern micro- and nanoelectronics considering TiN/Ti diffusion barrier structures as an example

    Pisma v Zhurnal Tekhnicheskoi Fiziki, 39:14 (2013),  34–42
  3. Specific features of relief formation on silicon etched by a focused ion beam

    Pisma v Zhurnal Tekhnicheskoi Fiziki, 36:21 (2010),  38–45


© Steklov Math. Inst. of RAS, 2026