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Medetov Nurlan Amirovich
Publications in Math-Net.Ru
On the nature of cracks using single-crystalline silicon subjected to anodic etching as an example
Fizika i Tekhnika Poluprovodnikov
,
48
:8 (2014),
1117–1122
Problems in measurements of parameters of elements and structures in modern micro- and nanoelectronics considering TiN/Ti diffusion barrier structures as an example
Pisma v Zhurnal Tekhnicheskoi Fiziki
,
39
:14 (2013),
34–42
Specific features of relief formation on silicon etched by a focused ion beam
Pisma v Zhurnal Tekhnicheskoi Fiziki
,
36
:21 (2010),
38–45
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