Emelyanov Viktor Viktorovich

Publications in Math-Net.Ru

1. Phenomenological model of metal coating etching in a gas mixtured plasma
   
   PFMT, 2023, no. 4(57),  69–73
2. Modeling of ir radiation influence on the phase composition of silicon dioxide coatings
   
   PFMT, 2023, no. 3(56),  64–68
3. Modeling of plasma-chemical etching of silicon nitride functional layer on silicon dioxide sublayer in microelectronics technologies
   
   PFMT, 2023, no. 3(56),  60–63