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Kananovich Nikita Aleksandrovich
Publications in Math-Net.Ru
Influence of the method of gas supply to the chamber on the processes of reactive magnetron sputtering of Ti–Al composite target
Zhurnal Tekhnicheskoi Fiziki
,
93
:3 (2023),
409–416
Influence of aluminum doping degree on the properties of titanium-aluminum oxide films
PFMT
, 2023, no. 2(55),
74–82
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Steklov Math. Inst. of RAS
, 2026