Korovin Anatoliy Gennad'evich

Publications in Math-Net.Ru

1. Analysis of thickness unevenness of the epitaxial silicon layer during deposition from sublimation sources in a vacuum
   
   University proceedings. Volga region. Physical and mathematical sciences, 2015, no. 4,  93–100
2. Thickness uniformity of silicon layers grown from a sublimation source by molecular-beam epitaxy
   
   Zhurnal Tekhnicheskoi Fiziki, 84:11 (2014),  155–158