Khairnar Anil G

Publications in Math-Net.Ru

1. PEALD grown high-k ZrO$_{2}$ thin films on SiC group IV compound semiconductor
   
   Fizika i Tekhnika Poluprovodnikov, 51:1 (2017),  133
2. Electrical properties of MOS capacitors formed by PEALD grown Al$_2$O$_3$ on silicon
   
   Fizika i Tekhnika Poluprovodnikov, 48:4 (2014),  514–517