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Dektyarev Sergei Valentinovich
Publications in Math-Net.Ru
Influence of high-intensity titanium ion beam energy density on dopant accumulation and diffusion in silicon
Fizika i Tekhnika Poluprovodnikov
,
59
:3 (2025),
150–152
Plasma-immersion formation of high-intensity ion beams
Pisma v Zhurnal Tekhnicheskoi Fiziki
,
43
:23 (2017),
3–10
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Steklov Math. Inst. of RAS
, 2026