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Rabotkin Sergey Viktorovich
Publications in Math-Net.Ru
Deposition of silicon–carbon coatings from the plasma of a non-self-sustained arc discharge with a heated cathode
Zhurnal Tekhnicheskoi Fiziki
,
86
:5 (2016),
51–56
Deposition of ultrahard Ti–Si–N coatings by pulsed high-current reactive magnetron sputtering
Zhurnal Tekhnicheskoi Fiziki
,
86
:2 (2016),
59–64
Hard carbon coatings deposited by pulsed high current magnetron sputtering
Zhurnal Tekhnicheskoi Fiziki
,
84
:12 (2014),
73–76
Gallium-doped zinc oxide films deposited using an unbalanced magnetron sputtering system
Zhurnal Tekhnicheskoi Fiziki
,
80
:5 (2010),
127–131
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