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Ivin S V
Publications in Math-Net.Ru
Effect of atomic silicon and germanium beams on the growth kinetics of Si
$_{1-x}$
Ge
$_{x}$
layers in Si–GeH
$_{4}$
molecular beam epitaxy
Zhurnal Tekhnicheskoi Fiziki
,
87
:3 (2017),
427–437
Vacuum hydride epitaxy of silicon: kinetics of monosilane pyrolysis on the growth surface
Fizika i Tekhnika Poluprovodnikov
,
45
:4 (2011),
566–575
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