Feklistov Konstantin Viktorovich

Publications in Math-Net.Ru

1. Redistribution of erbium and oxygen recoil atoms and the structure of silicon thin surface layers formed by high-dose argon implantation through Er and SiO$_{2}$ surface films
   
   Fizika i Tekhnika Poluprovodnikov, 52:13 (2018),  1589–1596
2. Doping silicon with erbium by recoil implantation
   
   Pisma v Zhurnal Tekhnicheskoi Fiziki, 41:16 (2015),  52–60
3. Precipitation of boron in silicon on high-dose implantation
   
   Fizika i Tekhnika Poluprovodnikov, 44:3 (2010),  302–305