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Doan H T

Publications in Math-Net.Ru

  1. Influence of the method of gas supply to the chamber on the processes of reactive magnetron sputtering of Ti–Al composite target

    Zhurnal Tekhnicheskoi Fiziki, 93:3 (2023),  409–416
  2. Influence of aluminum doping degree on the properties of titanium-aluminum oxide films

    PFMT, 2023, no. 2(55),  74–82
  3. Peculiarity of reactive magnetron deposition of tantalum oxide films with different methods of gas supply into the chamber

    PFMT, 2022, no. 3(52),  97–104


© Steklov Math. Inst. of RAS, 2026