RUS
ENG
Full version
PEOPLE
Fadeev Andrei Valer'evich
Publications in Math-Net.Ru
Analytical model of atomic layer deposition of films on 3D structures with high aspect ratios
Zhurnal Tekhnicheskoi Fiziki
,
88
:2 (2018),
243–250
©
Steklov Math. Inst. of RAS
, 2026
