Publications in Math-Net.Ru
-
Synthesis of TiN, Ti and TiSi$_{2}$ thin films for the contact system of solar cells
Fizika Tverdogo Tela, 62:1 (2020), 46–51
-
Low-temperature synthesis of $\alpha$-SiC nanocrystals
Fizika Tverdogo Tela, 61:12 (2019), 2447–2453
-
X-ray reflectometry and simulation of the parameters of SiC epitaxial films on Si(111), grown by the atomic substitution method
Fizika Tverdogo Tela, 59:5 (2017), 986–998
-
Structure and composition of silicon carbide films synthesized by ion implantation
Fizika Tverdogo Tela, 56:11 (2014), 2231–2245
-
Influence of treatment in the (O$_2$,H$_2$) plasma on the structure and physical properties of SnO$_x$ films
Fizika Tverdogo Tela, 53:2 (2011), 364–370
-
Crystallization of $\beta$-SiC in thin SiC$_x$ layers ($x$ = 0.03–1.40) synthesized by multiple implantation of carbon ions into silicon
Zhurnal Tekhnicheskoi Fiziki, 81:2 (2011), 118–125
© , 2026