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Shemardov Sergei Grigor'evich

Publications in Math-Net.Ru

  1. Implantation of silicon ions into sapphire: low doses

    Fizika i Tekhnika Poluprovodnikov, 54:8 (2020),  766–770
  2. On the generation of charge-carrier recombination centers in the sapphire substrates of silicon-on-sapphire structures

    Fizika i Tekhnika Poluprovodnikov, 49:8 (2015),  1124–1128
  3. Recrystallization of silicon-on-sapphire structures at various amorphization-ion-beam energies

    Fizika i Tekhnika Poluprovodnikov, 47:2 (2013),  264–266
  4. Crystalline quality improvement in silicon films on sapphire using recrystallization from the silicon-sapphire interface

    Fizika i Tekhnika Poluprovodnikov, 44:10 (2010),  1433–1435
  5. Высокотемпературная ионная имплантация мышьяка в кремний

    Fizika i Tekhnika Poluprovodnikov, 24:6 (1990),  1132–1133
  6. Исследование распределения аморфной и кристаллической фазы ионно-синтезированного SiC в Si

    Fizika i Tekhnika Poluprovodnikov, 22:4 (1988),  731–732


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