Shapoval Sergei Yur'evich

Publications in Math-Net.Ru

1. Модификация параметров AlGaN/GaN-транзисторных структур пассивацией и обработкой в водородной плазме
   
   Zhurnal Tekhnicheskoi Fiziki, 96:2 (2026),  336–344
2. Radiation hardness of bipolar transistor based integrated circuits improved by ECR hydrogen plasma treatment and Si-wafers gettering
   
   Fizika i Tekhnika Poluprovodnikov, 57:3 (2023),  195–201
3. Investigation of the effect of atomic composition on the plasma-chemical etching rate of silicon nitride in high-power transistors based on an AlGaN/GaN heterojunction
   
   Fizika i Tekhnika Poluprovodnikov, 54:8 (2020),  748–752
4. Wide-aperture detector of terahertz radiation based on GaAs/InGaAs transistor structure with large-area slit grating gate
   
   Pisma v Zhurnal Tekhnicheskoi Fiziki, 36:8 (2010),  39–47