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Publications in Math-Net.Ru
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Double-mirror monochromator for the 4+ generation “SKIF” synchrotron light source
Zhurnal Tekhnicheskoi Fiziki, 95:10 (2025), 1963–1972
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Kirkpatrick–Baez focusing system for synchrotron applications
Zhurnal Tekhnicheskoi Fiziki, 95:10 (2025), 1954–1962
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Ion beam machine for correction and aspherization of the surface shape of optical elements UIP-300
Zhurnal Tekhnicheskoi Fiziki, 95:9 (2025), 1825–1835
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Correlative extreme ultraviolet, ultraviolet and optical microscopy based on a specular microscope with axial tomography
Zhurnal Tekhnicheskoi Fiziki, 94:8 (2024), 1302–1313
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The use of morphometric variables in the surface topography study of X-ray optical elements
Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023), 1059–1068
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Investigation of the angular dependences of the velocities of ion-beam sputtering of metals for the synthesis of mask blanks
Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023), 1051–1053
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Study of the effect of neon ion energy on the surface roughness of the main cuts of monocrystalline silicon during ion etching
Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023), 1046–1050
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Off-axis aspherical collector for EUV-lithography and SXR microscopy
Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023), 963–967
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Prospects for the use of reactive ion-beam etching of fused quartz with a mixture of tetrafluoromethane and argon for aspherizing the surface of optical elements
Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022), 1248–1252
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Diamond-carbide-silicon composite “skeleton” as a promising material for X-ray optical substrates
Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022), 1238–1242
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Model of physical sputtering of amorphous materials
Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022), 1230–1237
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Study of the influence of the energy of argon ions on the surface roughness of the main sections of single-crystal silicon
Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022), 1219–1223
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Ion-beam methods for high-precision processing of optical surfaces
Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020), 1922–1930
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Simulation of local error correction of the surface shape by a low-dimensional ion beam
Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019), 1650–1655
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