|
|
Publications in Math-Net.Ru
-
Fluctuation analysis of the surface microrelief of silicon-on-insulator structures after radiation exposure
Fizika i Tekhnika Poluprovodnikov, 58:12 (2024), 668–675
-
Silicon-on-insulator structures microtopography transformations features after photonic and corpuscular radiation exposure
Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023), 1025–1031
-
Effect of hydrogen implantation dose on the relaxation of electrophysical characteristics of silicon-on-insulator structures after exposure to X-rays
Fizika i Tekhnika Poluprovodnikov, 56:8 (2022), 753–758
-
Secondary-ion mass spectroscopy for analysis of the implanted hydrogen profile in silicon and impurity composition of silicon-on-insulator structures
Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020), 1850–1853
-
Formation of fluorine-containing defects and nanocrystals in SiO$_2$ upon implantation with fluorine, silicon, and germanium ions: Numerical simulation and photoluminescence spectroscopy
Fizika Tverdogo Tela, 57:11 (2015), 2106–2111
-
Anomalous distribution of germanium implanted into a SOI dielectric layer after the annealing of radiation defects
Fizika i Tekhnika Poluprovodnikov, 48:5 (2014), 631–635
© , 2026