Publications in Math-Net.Ru
-
Ion synthesis of silicon-on-insulator structures with a lead-silicate insulating layer
Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:14 (2021), 47–50
-
Formation of W/HfO$_2$/Si gate structures using in situ magnetron sputtering and rapid thermal annealing
Zhurnal Tekhnicheskoi Fiziki, 84:5 (2014), 82–87
-
Formation and investigation of cobalt silicide ultrathin layers in Ti/Co/Ti-, TiN/Ti/Co-, and TiN/Co-on-silicon structures
Zhurnal Tekhnicheskoi Fiziki, 82:2 (2012), 122–128
-
Annealing effect on the formation of high-$k$ dielectric in the W/ultrathin HfO$_2$/Si-substrate system
Pisma v Zhurnal Tekhnicheskoi Fiziki, 38:21 (2012), 48–55
-
Features of CoSi$_2$ phase formation by two-stage rapid thermal annealing of Ti/Co/Ti/Si(100) structures
Pisma v Zhurnal Tekhnicheskoi Fiziki, 37:3 (2011), 36–44
© , 2026