|
|
Publications in Math-Net.Ru
-
Influence of current density on the structure of thin films of amorphous silicon suboxide during electron beam annealing
Prikl. Mekh. Tekh. Fiz., 64:5 (2023), 52–58
-
Measurement of silicon melt temperature during electron beam refining
Prikl. Mekh. Tekh. Fiz., 64:5 (2023), 39–44
-
Formation of germanium nanocrystals and amorphous nanoclusters in GeO[SiO] and GeO[SiO$_2$] films using electron beam annealing
Zhurnal Tekhnicheskoi Fiziki, 92:9 (2022), 1402–1409
-
Effect of annealing temperature on the kinetics of aluminum-induced crystallization of silicon suboxide thin films
Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:21 (2021), 39–42
-
Gold-induced crystallization of thin films of amorphous silicon suboxide
Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:14 (2021), 35–38
-
Electron-beam crystallization of thin films of amorphous silicon suboxide
Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:6 (2021), 26–28
-
Deposition of amorphous and microcrystalline silicon films by gas-jet plasma-chemical method
Fizika i Tekhnika Poluprovodnikov, 53:12 (2019), 1721–1725
-
Deposition of silicon films doped with boron and phosphorus by the gas-jet plasma-chemical method
Fizika i Tekhnika Poluprovodnikov, 53:1 (2019), 132–136
-
High-efficiency electron source with a hollow cathode in technologies of thin film deposition and surface treatment under forevacuum pressures
Zhurnal Tekhnicheskoi Fiziki, 88:6 (2018), 914–919
-
Measuring the temperature and concentration secondary electrons in an argon electron-beam plasma
Prikl. Mekh. Tekh. Fiz., 59:5 (2018), 115–122
-
Silicon film deposition using a gas-jet plasma-chemical method: experiment and gas-dynamic simulation
Prikl. Mekh. Tekh. Fiz., 59:5 (2018), 22–30
-
Gas flow activated in an electron-beam plasma
Prikl. Mekh. Tekh. Fiz., 48:1 (2007), 3–10
© , 2026