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Publications in Math-Net.Ru
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Aspects of image formation in compound refractive lenses in the soft X-ray wavelength range
Zhurnal Tekhnicheskoi Fiziki, 94:7 (2024), 1182–1195
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Study of the dynamics of heating anode units in a maskless nanolithograph based on an array of microfocus X-ray tubes
Zhurnal Tekhnicheskoi Fiziki, 91:10 (2021), 1566–1576
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Peculiarities of deformation of round thin-film membranes and experimental determination of their effective characteristics
Zhurnal Tekhnicheskoi Fiziki, 91:10 (2021), 1454–1465
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Analysis of electron emission from a single silicon cathode to quasi-vacuum (air) using atomic force microscopy
Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020), 1931–1937
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Optimization of an anode membrane with a transmission-type target in a system of soft X-ray sources for X-ray nanolithography
Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020), 1789–1796
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Development of technological principles for creating a system of microfocus X-ray tubes based on silicon field emission nanocathodes
Zhurnal Tekhnicheskoi Fiziki, 89:12 (2019), 1836–1842
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