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Publications in Math-Net.Ru
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CVD diamond structures with a $p$–$n$ junction – diodes and transistors
Zhurnal Tekhnicheskoi Fiziki, 95:3 (2025), 540–548
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Study of photo and electroluminescence of nitrogen-related color centers in a diamond $p$–$i$–$n$ diode
Pisma v Zhurnal Tekhnicheskoi Fiziki, 51:10 (2025), 48–51
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Electroluminescence of germanium-vacancy color centers in a diamond $p$–$i$–$n$ diode
Pisma v Zhurnal Tekhnicheskoi Fiziki, 51:8 (2025), 3–6
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Non-annealed ohmic contacts with reduced resistance to $p$- and $n$-type epitaxial layers of diamond and their thermal stability
Fizika i Tekhnika Poluprovodnikov, 58:8 (2024), 409–414
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Electrophysical properties of multilayer DLC films with different $sp^3$-phase contents
Pisma v Zhurnal Tekhnicheskoi Fiziki, 50:17 (2024), 30–33
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Thermal annealing of multilayer films of diamond-like carbon with a variable content of $sp^3$-phase
Pisma v Zhurnal Tekhnicheskoi Fiziki, 50:13 (2024), 12–15
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Plasma chemical deposition of hydrogenated DLC films with different hydrogen and $sp^3$-hybrid carbon content
Fizika i Tekhnika Poluprovodnikov, 57:5 (2023), 309–312
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Surface treatment of gallium arsenide after etching in C$_2$F$_5$Cl-plasma
Pisma v Zhurnal Tekhnicheskoi Fiziki, 49:19 (2023), 39–42
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Design of tunnel-coupled quantum wells for a Mach–Zehnder scheme modulator construction
Fizika i Tekhnika Poluprovodnikov, 56:9 (2022), 833–838
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Influence of chloropentafluoroethane inductively coupled plasma parameters on the rate and characteristics of gallium arsenide etching
Fizika i Tekhnika Poluprovodnikov, 56:7 (2022), 685–688
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Effect of the chloropentafluoroethane additive in chlorine-containing plasma on the etching rate and etching-profile characteristics of gallium arsenide
Fizika i Tekhnika Poluprovodnikov, 55:10 (2021), 837–840
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Features of the vapor-phase epitaxy of GaAs on nonplanar substrates
Fizika i Tekhnika Poluprovodnikov, 54:9 (2020), 958–961
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Formation of ohmic contacts to a diamond-like carbon layer deposited on a dielectric diamond substrate
Fizika i Tekhnika Poluprovodnikov, 54:9 (2020), 865–867
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Modification of the ratio between $sp^2/sp^3$-hybridized carbon components in PECVD diamond-like films
Fizika i Tekhnika Poluprovodnikov, 54:9 (2020), 855–858
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SIMS analysis of carbon-containing materials: content of carbon atoms in $sp^{2}$ and $sp^{3}$ hybridization states
Pisma v Zhurnal Tekhnicheskoi Fiziki, 46:6 (2020), 38–42
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Plasma-chemical deposition of diamond-like films onto the surface of heavily doped single-crystal diamond
Fizika i Tekhnika Poluprovodnikov, 53:9 (2019), 1229–1232
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A new approach to tof-sims analysis of the phase composition of carbon-containing materials
Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:2 (2019), 50–54
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Plasma chemical etching of gallium arsenide in C$_{2}$F$_{5}$Cl-based inductively coupled plasma
Fizika i Tekhnika Poluprovodnikov, 52:11 (2018), 1362–1365
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Low-temperature deposition of SiN$_ x$ films in SiH$_{4}$/Ar + N$_{2}$ inductively coupled plasma under high silane dilution with argon
Fizika i Tekhnika Poluprovodnikov, 51:11 (2017), 1503–1506
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Si$_3$N$_4$ layers for the in-situ passivation of GaN-based HEMT structures
Fizika i Tekhnika Poluprovodnikov, 49:11 (2015), 1469–1472
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