Perekalov Aleksandr Alekseevich

Publications in Math-Net.Ru

1. Формирование перспективных для электронно-лучевой и экстремально-ультрафиолетовой нанолитографии тонкопленочных резистивных материалов на основе оловоорганических оксокластеров
   
   Zhurnal Tekhnicheskoi Fiziki, 96:2 (2026),  383–394
2. Radial distribution of emitting centers in Ar laser plasma
   
   Zhurnal Tekhnicheskoi Fiziki, 95:9 (2025),  1647–1655
3. Experimental stand for studying the characteristics of powerful laser-plasma sources of EUV radiation
   
   Zhurnal Tekhnicheskoi Fiziki, 95:9 (2025),  1639–1646
4. Calculation and experimental determination of the length of a laser spark in gas-jet targets
   
   Zhurnal Tekhnicheskoi Fiziki, 95:7 (2025),  1289–1296
5. Absorption of laser radiation in lps with gas-jet targets
   
   Zhurnal Tekhnicheskoi Fiziki, 95:7 (2025),  1283–1288
6. Stand for testing extreme ultraviolet sensitive photoresists
   
   Zhurnal Tekhnicheskoi Fiziki, 94:8 (2024),  1323–1330
7. Capsule gas-filled target for a laser-plasma EUV source
   
   Zhurnal Tekhnicheskoi Fiziki, 94:7 (2024),  1174–1181
8. Emission characteristics of a laser-plasma source of extreme ultraviolet radiation with thin-film targets
   
   Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023),  892–896
9. Study of the emission spectra of Cl-, Br-, I-containing targets in the spectral range of 3–6.5 nm when excited by pulsed laser radiation
   
   Kvantovaya Elektronika, 53:5 (2023),  425–429
10. Prospects for the use of reactive ion-beam etching of fused quartz with a mixture of tetrafluoromethane and argon for aspherizing the surface of optical elements
    
    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1248–1252
11. Imaging system of a plasma torch of a Betatron X-ray source
    
    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1202–1206
12. Thin film Al targets for a laser-plasma source of extreme ultraviolet radiation
    
    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1199–1201
13. Investigation of the emission properties of gas-jet targets in the “water transparency window” of 2.3–4.4 nm under pulsed laser excitation
    
    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1185–1191
14. Emission spectra of liquid-jet targets of hexane C$_6$Н$_{14}$, dichloromethane CH$_2$Cl$_2$, methylene bromide CH$_3$Br in the range 4–20 nm under pulsed laser excitation
    
    Optics and Spectroscopy, 130:7 (2022),  991–995
15. Emission spectra of molecular gases CHF$_3$, CCl$_2$F$_2$, SF$_6$ in the range 3–20 nm under pulsed laser excitation using various gas jets as targets
    
    Optics and Spectroscopy, 130:2 (2022),  217–223
16. Measurements of the absolute values of the radiation intensity in the wavelength range of 6.6–32 nm of stainless steel targets with pulsed laser excitation
    
    Zhurnal Tekhnicheskoi Fiziki, 91:10 (2021),  1448–1453
17. Emission spectra of molecular gases N$_2$ and CO$_2$ in the range 3–20 nm under pulsed laser excitation using various gas jets as targets
    
    Optics and Spectroscopy, 129:6 (2021),  755–759
18. Emission spectra of heavy inert gases Kr, Xe in the range 3–20 nm under pulsed laser excitation using various gas jets as targets
    
    Optics and Spectroscopy, 129:3 (2021),  266–271
19. Emission spectra of light inert gases Ne and Ar in the range 3–20 nm under pulsed laser excitation using various gas jet-targets
    
    Optics and Spectroscopy, 129:2 (2021),  146–152
20. Measurements of the absolute intensities of spectral lines of Kr, Ar, and O ions in the wavelength range of 10--18 nm under pulsed laser excitation
    
    Kvantovaya Elektronika, 51:8 (2021),  700–707
21. Emission properties of laser plasma excited on molecular-cluster carbon dioxide jets
    
    Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019),  1656–1662
22. Observation of laser-induced spark in the density jump in a gas-jet target
    
    Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:19 (2019),  14–16


23. Dispersion elements for X-ray mirror spectrometer on a range of 7–30 nm
    
    Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023),  1002–1008