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Samoiluk T T
Publications in Math-Net.Ru
Effect of double implantation of silicon and fluorine atoms on semi-insulating gallium-arsenide electrophysical parameters
Fizika i Tekhnika Poluprovodnikov
,
26
:7 (1992),
1306–1312
Residual Defects in Silicon under Implantation of As
$^{+}$
Ions in the Self-Annealing Mode
Fizika i Tekhnika Poluprovodnikov
,
21
:10 (1987),
1863–1867
Crystallization and the effect of the annealing macrodefects during the process of high dense ionic implantation of semiconducting crystals
Pisma v Zhurnal Tekhnicheskoi Fiziki
,
11
:18 (1985),
1110–1113
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