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Shabelnikova Yana Leonidovna

Publications in Math-Net.Ru

  1. Ion-beam lithography: modelling and analytical description of the deposited in resist energy

    Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022),  1099–1103
  2. Analysis of the tomographic reconstruction from polychromatic projections for objects with highly absorbing inclusions

    Informatsionnye Tekhnologii i Vychslitel'nye Sistemy, 2020, no. 3,  49–61
  3. Quantitative description of the properties of extended defects in silicon by means of electron- and laser-beam-induced currents

    Fizika i Tekhnika Poluprovodnikov, 49:6 (2015),  758–762
  4. Calculating the extended defect contrast for the X-ray-beam-induced current method

    Pisma v Zhurnal Tekhnicheskoi Fiziki, 38:20 (2012),  1–7
  5. Comparative study of X-ray fluorescence signal collection by collimators of two types

    Pisma v Zhurnal Tekhnicheskoi Fiziki, 38:10 (2012),  6–13


© Steklov Math. Inst. of RAS, 2026