Publications in Math-Net.Ru
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Ion-beam lithography: modelling and analytical description of the deposited in resist energy
Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022), 1099–1103
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Analysis of the tomographic reconstruction from polychromatic projections for objects with highly absorbing inclusions
Informatsionnye Tekhnologii i Vychslitel'nye Sistemy, 2020, no. 3, 49–61
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Quantitative description of the properties of extended defects in silicon by means of electron- and laser-beam-induced currents
Fizika i Tekhnika Poluprovodnikov, 49:6 (2015), 758–762
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Calculating the extended defect contrast for the X-ray-beam-induced current method
Pisma v Zhurnal Tekhnicheskoi Fiziki, 38:20 (2012), 1–7
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Comparative study of X-ray fluorescence signal collection by collimators of two types
Pisma v Zhurnal Tekhnicheskoi Fiziki, 38:10 (2012), 6–13
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