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Publications in Math-Net.Ru
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Оптимизация процессов ионного травления в микро- и наноэлектронике путем воздействия на энергетический спектр ионов
Zhurnal Tekhnicheskoi Fiziki, 96:1 (2026), 67–80
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Thermally stable ferroelectric HfO$_2$ : Al$_2$O$_3$ (10:1) in silicon-on-insulator and silicon-on-sapphire heterostructures after rapid thermal annealing treatments and oxidation-induced silicon thinning
Pis'ma v Zh. Èksper. Teoret. Fiz., 121:12 (2025), 945–951
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Chiral metasurfaces based on arrays of Co nanospirals obtained by glancing angle deposition
Fizika Tverdogo Tela, 66:7 (2024), 1062–1067
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Tailoring magnetic anisotropy and optical characteristics of nanostructural Co films by oblique angle deposition
Fizika Tverdogo Tela, 65:6 (2023), 996–1001
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Low resistance state degradation during endurance measurements in HfO$_2$(8 нм)/HfO$_X$N$_Y$-based structures
Fizika i Tekhnika Poluprovodnikov, 57:6 (2023), 451–454
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Low-pressure inductively coupled CF$_{3}$Br plasma studied by the Langmuir probe and optical emission spectroscopy techniques
Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:2 (2021), 52–54
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Influence of the finite-size effect on the cluster ion emission of silicon nanostructures
Pis'ma v Zh. Èksper. Teoret. Fiz., 111:8 (2020), 531–535
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Analytical model of atomic layer deposition of films on 3D structures with high aspect ratios
Zhurnal Tekhnicheskoi Fiziki, 88:2 (2018), 243–250
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Dose dependence of nanocrystal formation in helium-implanted silicon layers
Pisma v Zhurnal Tekhnicheskoi Fiziki, 44:7 (2018), 39–46
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Biosensor properties of SOI nanowire transistors with a PEALD Al$_{2}$O$_{3}$ dielectric protective layer
Fizika i Tekhnika Poluprovodnikov, 50:5 (2016), 643–649
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