Antsiferov Pavel Stanislavovich

Publications in Math-Net.Ru

1. Damped vacuum discharge as a variant of EUV radiation source for lithography
   
   Zhurnal Tekhnicheskoi Fiziki, 95:7 (2025),  1297–1302
2. The grazing incidence reflection coefficient measurement with the usage of single channel scheme
   
   Optics and Spectroscopy, 131:8 (2023),  1074–1079
3. Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection (50th anniversary of the Institute of Spectroscopy, Russian Academy of Sciences)
   
   UFN, 189:3 (2019),  323–334
4. VUV radiation of xenon in a fast conical discharge
   
   Optics and Spectroscopy, 125:4 (2018),  457–462