Main publications:

• Oborudovanie dlya fotolitografii i izgotovleniya fotoshablonov : [Ucheb. posobie] / A. B. Kamnev; Mosk. in-t elektron. mashinostroeniya. - Moskva : MIEM, 1988. - 52 s. : il.

Publications in Math-Net.Ru

Personal pages:

• 

Organisations:

• Moscow Institute of Electronic Engineering
• Lomonosov Moscow State University