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Publications in Math-Net.Ru
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Study of mechanical and optical properties of MoSiN membranes
Fizika i Tekhnika Poluprovodnikov, 59:6 (2025), 349–354
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Effect of heat treatment on the physical and mechanical properties of thin-film membrane Al structures of various shapes
Pisma v Zhurnal Tekhnicheskoi Fiziki, 51:2 (2025), 10–14
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Aspects of image formation in compound refractive lenses in the soft X-ray wavelength range
Zhurnal Tekhnicheskoi Fiziki, 94:7 (2024), 1182–1195
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Features of influence of grain orientation and size on mechanical properties of Al/Mo thin film membranes
Pisma v Zhurnal Tekhnicheskoi Fiziki, 50:9 (2024), 10–15
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Investigation of the real shape changes of round thin-film membranes during the bulge testing
Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022), 1253–1260
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Technique for investigation of the shape changes of wafers and thin-film membranes by using geomorphometric approaches
Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022), 1113–1123
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Approaches to determining curvature of wafers by their topography
UFN, 192:7 (2022), 754–771
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Study of the dynamics of heating anode units in a maskless nanolithograph based on an array of microfocus X-ray tubes
Zhurnal Tekhnicheskoi Fiziki, 91:10 (2021), 1566–1576
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Peculiarities of deformation of round thin-film membranes and experimental determination of their effective characteristics
Zhurnal Tekhnicheskoi Fiziki, 91:10 (2021), 1454–1465
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Analysis of electron emission from a single silicon cathode to quasi-vacuum (air) using atomic force microscopy
Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020), 1931–1937
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Experimental determination of mechanical properties of the anode cell of an X-ray lithograph
Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020), 1838–1842
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Optimization of an anode membrane with a transmission-type target in a system of soft X-ray sources for X-ray nanolithography
Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020), 1789–1796
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Development of technological principles for creating a system of microfocus X-ray tubes based on silicon field emission nanocathodes
Zhurnal Tekhnicheskoi Fiziki, 89:12 (2019), 1836–1842
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Combined ultramicrotomy and atomic force microscopy study of the structure of a bulk heterojunction in polymer solar cells
Fizika i Tekhnika Poluprovodnikov, 52:1 (2018), 110–117
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Technological features influence on magnetic sensitivity of sensor based on ferromagnetic structures
J. Sib. Fed. Univ. Math. Phys., 10:2 (2017), 181–185
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The characteristics of observation of the non-uniform magnetization on the surface of the thin magnetic films in Ta/CoFeB/MgO/CoFeB/Ta multilayers
J. Sib. Fed. Univ. Math. Phys., 10:1 (2017), 40–44
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Shape-coupled magnetoresistive structures: a new approach to higher sensitivity
Pisma v Zhurnal Tekhnicheskoi Fiziki, 42:10 (2016), 99–105
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