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Publications in Math-Net.Ru
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Thermally stable ferroelectric HfO$_2$ : Al$_2$O$_3$ (10:1) in silicon-on-insulator and silicon-on-sapphire heterostructures after rapid thermal annealing treatments and oxidation-induced silicon thinning
Pis'ma v Zh. Èksper. Teoret. Fiz., 121:12 (2025), 945–951
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Low resistance state degradation during endurance measurements in HfO$_2$(8 םל)/HfO$_X$N$_Y$-based structures
Fizika i Tekhnika Poluprovodnikov, 57:6 (2023), 451–454
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Atomic layer deposition of thin films onto 3$D$ nanostructures: the effect of wall tilt angle and aspect ratio of trenches
Zhurnal Tekhnicheskoi Fiziki, 88:10 (2018), 1573–1580
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Analytical model for atomic-layer deposition of thin films on the walls of cylindrical holes with a relatively high aspect ratio
Zhurnal Tekhnicheskoi Fiziki, 88:8 (2018), 1264–1272
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Analytical model of atomic layer deposition of films on 3D structures with high aspect ratios
Zhurnal Tekhnicheskoi Fiziki, 88:2 (2018), 243–250
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Biosensor properties of SOI nanowire transistors with a PEALD Al$_{2}$O$_{3}$ dielectric protective layer
Fizika i Tekhnika Poluprovodnikov, 50:5 (2016), 643–649
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