RUS
ENG
Full version
PEOPLE
Zaytsev S I
Publications in Math-Net.Ru
Ion-beam lithography: modelling and analytical description of the deposited in resist energy
Zhurnal Tekhnicheskoi Fiziki
,
92
:8 (2022),
1099–1103
Laser ion beam formation for nanotechnologies
Pis'ma v Zh. Èksper. Teoret. Fiz.
,
78
:4 (2003),
291–294
©
Steklov Math. Inst. of RAS
, 2026