This article is cited in 1 paper

Methods for computer simulation of crystal sputtering

E. Yu. Zykova, A. S. Mosunov, V. E. Yurasova

Faculty of Physics, Moscow State University, Moscow, 119992, Russia

Abstract: A computer program for molecular dynamics simulation of sputtering is developed. Numerical methods for the integration of the equations of motion are described. Algorithms for constructing models of single-and polycrystalline targets are proposed. The applicability of various ion-atom and atom-atom interaction potentials to sputtering computations is analyzed.

Key words: computer simulation, crystal sputtering, molecular dynamics methods, single crystals, polycrystals.

UDC: 519.634

Received: 20.12.2007

 English version: Computational Mathematics and Mathematical Physics, 2008, 48:10, 1904–1914

Bibliographic databases:

• 
• 
•