Abstract:
Two algorithms for broadband optical monitoring of the deposition of optical coatings are considered: the first one is without solving the additional inverse problem for refining the thicknesses of already deposited layers, the second one is with its solution. It is shown that refinement of the thicknesses of already deposited layers reduces errors in the layer thicknesses, but does not always provide a more accurate implementation of the required spectral properties of the coating. It is demonstrated for the first time that when choosing a control algorithm, the presence of the error self-compensation effect should be taken into account.
