Computational approach to the investigation of the error self-compensation effect in the deposition of multilayer optical coatings

I. V. Kochikov^a, A. V. Tikhonravov^a, A. G. Yagola<sup>b

a</sup> Research Computing Center, Lomonosov Moscow State University, Moscow, 119234 Russia
^b Faculty of Physics, Lomonosov Moscow State University, Moscow, 119991 Russia

Abstract: A new computational approach is developed to evaluate the strength of the error self-compensation effect in the case of broadband optical monitoring of the multilayer coating deposition process. A new form of estimating the strength of the error self-compensation effect is suggested. Computational experiments simulating the deposition process are used to study the presence of the self-compensation effect and it is shown that the assessment of two parameters characterizing the degree of error correlation and the strength of the self-compensation effect is sufficient from a practical point of view.

Key words: inverse problems, optical coatings, broadband optical monitoring, error correlation.

UDC: 519.6

Received: 24.10.2019
Revised: 24.10.2019
Accepted: 11.02.2020

DOI: 10.31857/S0044466920060058

 English version: Computational Mathematics and Mathematical Physics, 2020, 60:6, 1017–1024

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