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Separation of gas mixtures in free molecular flow through a vibrating membrane

V. L. Kovalev, V. V. Kosyanchuk, A. N. Yakunchikov

Lomonosov Moscow State University, Faculty of Mechanics and Mathematics

Abstract: A free molecular gas flow through a membrane vibrating in its plane is studied. Optimal vibration parameters are determined for the most efficient separation of gases with different molecular masses.

Key words: membrane, separation of gases, high-frequency vibrations, microelectromechanical systems (MEMS), nanoelectromechanical systems (NEMS), free molecular flow.

UDC: 533.5

Received: 16.06.2014

 English version: Moscow University Mathematics Bulletin, Moscow University Mеchanics Bulletin, 2015, 70:5, 126–129

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