This article is cited in 1 paper

Simulation of Volume Treatment Mechanism of Capillary-porous Materials in Low Pressure Radiofrequency Plasmas

V. S. Zheltoukhin^a, G. N. Koulevtsov^b, G. R. Rakhmatoullina^b, A. M. Sungatoullin<sup>b

a</sup> Chair of Mathematical Statistics of Kazan State University
^b Kazan State Technological University

Abstract: Physical effect of volumetric modification of capillary-porous materials in low pressure RF plasmas is simulated. As it can be concluded from calculations, non-self-maintained discharge may be a reason of volumetric modification. This discharge appears in porous volume in a series of electron and ion emission from nanopore surfaces. Transmission of kinetic energy and recombination of charged particles on nanopore surfaces leads to a change of surface properties. That is interpreted as volumetric modification of capillary-porous materials.

Keywords: radiofrequency plasma, low pressure, simulation, nanoporous disharge, volume modification of nanoporous materials.

UDC: 519.958

Received: 15.10.2008