Some aspects of simulation of interaction between plasma and solids as well as capillary-porous material

I. Sh. Abdullin^a, V. S. Zheltukhin^b, O. V. Pankratova^b, I. R. Sagbiev<sup>a

a</sup> Kazan State Technological University
^b Kazan State University

Abstract: A mathematical model of solids as well as capillary-porous materials (CPM) treatment by low pressure RF plasmas is constructed. The model is a base for theoretical investigations of interaction between low temperature plasmas materials, as well as for technological parameters calculation of different materials plasma treatment in practical work. Necessity of model construction is stimulated by abilities of practical using of RF plasmas treatment of different materials.

UDC: 519.958

Received: 26.10.2007